Daten zum Projekt

A new hybrid three-dimensional surface nano-patterning technology for nano-device applications

Initiative: Herstellung funktionaler Oberflächen (beendet)
Bewilligung: 16.01.2009
Laufzeit: 3 Jahre


Techniques for manufacturing large-area surface patterns with well-defined nanostructures, as required for advanced device applications with excellent performance, are lacking today. To overcome this bottleneck a new three-dimensional (3-D) surface nano-patterning technique will be established. The realization of this hybrid methodology will enable large-scale 3-D surface patterns with multifunctional and well-defined nano-structures. More importantly, it will give access to the most important advantage of nano-structured materials, i.e. the extremely large specific surface area, which is missing in two-dimensional surface nano-patterning. As a first application of this innovative fabrication strategy, 3-D tungsten oxide tubular surface nanostructures will be used for constructing a new high-sensitivity gas sensor device with multi-selective gas sensing capability.


  • Prof. Dr.-Ing. Gerhard Wilde

    Universität Münster
    Institut für Materialphysik (IMP)
    und Center for Nanotechnology (CeNTech)

  • Prof. Dr. Yong Lei

    Technische Universität Ilmenau
    Institut für Physik &
    Institut für Mikro- und Nanotechnologien MacroNano
    Fachgebiet 3D-Nanostrukturierung

  • Prof. Dr. Jürgen Wöllenstein

    Fraunhofer-Institut für
    Physikalische Meßtechnik
    Gas- und Prozessmesstechnik

  • Dr. Andreas Greiner

    Universität Freiburg
    Institut für Mikrosystemtechnik (IMTEK)
    Lehrstuhl für Simulation
    Physical Modelling and Simulation Group